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AE APEX 3013 RF Generator Advanced Energy 3156114-001 AMAT Smart Match 3kW F47
AE APEX 3013 RF Generator Advanced Energy 3156114-001 AMAT Smart Match 3kW F47
AE APEX 3013 RF Generator Advanced Energy 3156114-001 AMAT Smart Match 3kW F47
AE APEX 3013 RF Generator Advanced Energy 3156114-001 AMAT Smart Match 3kW F47
AE APEX 3013 RF Generator Advanced Energy 3156114-001 AMAT Smart Match 3kW F47
AE APEX 3013 RF Generator Advanced Energy 3156114-001 AMAT Smart Match 3kW F47
AE APEX 3013 RF Generator Advanced Energy 3156114-001 AMAT Smart Match 3kW F47
AE APEX 3013 RF Generator Advanced Energy 3156114-001 AMAT Smart Match 3kW F47
AE APEX 3013 RF Generator Advanced Energy 3156114-001 AMAT Smart Match 3kW F47
AE APEX 3013 RF Generator Advanced Energy 3156114-001 AMAT Smart Match 3kW F47
AE APEX 3013 RF Generator Advanced Energy 3156114-001 AMAT Smart Match 3kW F47
AE APEX 3013 RF Generator Advanced Energy 3156114-001 AMAT Smart Match 3kW F47

AE APEX 3013 RF Generator Advanced Energy 3156114-001 AMAT Smart Match 3kW F47

$ 3432

Availability: 87 in stock
  • Country/Region of Manufacture: China
  • Return shipping will be paid by: Buyer
  • Restocking Fee: No
  • Refund will be given as: Money Back
  • Wafer Processing Component Type: RF Generator
  • MPN: 3156114-001
  • Item must be returned within: 14 Days
  • Condition: New Unit, Tested, Guaranteed fully functional. Unit is dusty, comes as pictured.
  • Model: APEX 3013
  • All returns accepted: Returns Accepted
  • Brand: Advanced Energy

    Description

    Here is an Advanced Energy APEX 3013 RF Generator with internal integrated PIN diode Switch Match and V/I probe.  This generator uses a V/I probe to calculate load power and impedance.  The integrated Switch Match uses pin diodes to set the output impedance(default is 15-j6.7ohms).  This generator has been tested into a 15-j7 ohm load to full load power of 3000W and is fully functional.  Used on Applied Materials chambers.
    Unit comes with Declaration of Conformity, CD Manual, and water fittings, as pictured.
    New Unit. Unit has some dust on it, as pictured.
    AE M/N 3156114-001
    Input: 208VAC 3 phase @14.5A per phase.
    Output: 3000W @ 13.56MHz via custom output connector, default output impedance 15-j6.7ohms
    Cooling: water cooled
    Tested, Guaranteed Fully Functional
    Additional item info:
    No additional parts, accessories, manuals, or cables are included, unless specifically pictured and stated as part of the listing.
    Shipping:
    I will ship via FedEx on your account at no additional charge. (Sorry, I do Not ship UPS or DHL, as their service is not reliable in my area.)
    If you need expedited shipping, let me know. Many times I can ship same or next day.
    I only ship to your ebay shipping address, so make sure it is correct BEFORE you purchase an item.
    Payment:
    PayPal, credit cards(processed through PayPal), or Bank Wire Transfers in USD(for purchases over 00 USD( fee added for wire transfers))
    Contact:
    If you feel you have not received 5 Star service, or have any questions, please contact me directly through ebay messages.  I am more than happy to help and resolve any issues or help with technical questions.
    International buyers:
    International buyers are responsible for all Customs, Duties, Taxes, Broker, and Any Other Fees or Forms associated with Importing Items from the USA
    .
    Returns:
    Please double check Part Numbers, Interfaces, Software, Compatibility, and Communication Requirements BEFORE you purchase an item.
    Returns are ONLY accepted for Warranty and items that don't match the item description.
    All returns must include all original undamaged items, in resalable condition with all original packaging including manuals, warranty forms, cables, etc.
    Please note: Warranty is Void and Returns will NOT be Accepted if Tamper Seals are Broken or Removed, or unit was connected to improper supply voltage.